Rapid Thermal Processing for R&D and unique thin-film technology
نویسندگان
چکیده
منابع مشابه
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Self-assembling block copolymers generate nanostructured patterns which are useful for a wide range of applications. In this paper we demonstrate the capability to control the morphology of the self-assembling process of PS-b-PMMA diblock copolymer thin films on unpatterned surfaces by means of fast thermal treatment performed in a rapid thermal processing machine. The methodology involves the ...
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ژورنال
عنوان ژورنال: Nanoindustry Russia
سال: 2017
ISSN: 1993-8578
DOI: 10.22184/1993-8578.2017.72.2.24.26